Publication | Closed Access
Nanoscale Wear Layers on Silicon Wafers Induced by Mechanical Chemical Grinding
59
Citations
36
References
2017
Year
Materials ScienceEngineeringMechanical Chemical GrindingMicrofabricationWear PreventionWear TestingMechanical EngineeringApplied PhysicsNanoscale Wear LayersSilicon Wafers InducedWear-resistant MaterialMicrostructureWear Resistance
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