Microscopy and Microanalysis · 2017 · 13 citations · 2 references
EngineeringMaterials EngineeringMaterials ScienceHeat TransferMicroelectromechanical SystemsThermal AnalysisHeat ConductionMems CharacterizationMems DesignMems FabricationMems MaterialsMems TestingElectrothermal ActuationShock Testing Of Mems DevicesThermal CharacterizationThermal Testing Of Mems DevicesThermo-mechanical Design
Jane Y Howe, Michelle S Thompson, Stas Dogel, Kota Ueda, Tsuyoshi Matsumoto, Hideki Kikuchi, Matthew Reynolds, Hooman Hosseinkhannazer, Thomas J Zega; In s
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