Vacuum · 2017 · 11 citations · 18 references
Natural SciencesMaterials EngineeringMaterials ScienceMetallurgySurface EngineeringSurface ScienceAmorphous MaterialsCoatingsEtching ProcessesSurface CoatingsSurface PhysicsThin Film AdhesionAmorphous CarbonCoating AdhesionEtch ChemistryEtch MechanismsFerrous AlloysLow-temperature MaterialsSurface Etching
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Diamond-like carbon: state of the art
A. Grill · Diamond and Related Materials · 1999 · 1K citations
Natural Sciences, Materials Engineering, Materials Science +8