Fundamentals towards large area synthesis of multifunctional Ultrananocrystalline diamond films via large area hot filament chemical vapor deposition bias enhanced nucleation/bias enhanced growth for fabrication of broad range of multifunctional devices

Publication | Closed Access

DOI

Citations

References

2017

Year

Jesús J. Alcantar-Peña, Elida de Obaldía, Jorge Montes-Gutierrez, Karam Kang, M. Josefina Arellano-Jiménez, Jose E. Ortega Aguilar, Greta P. Suchy, D. Berman-Mendoza, Rafael García, Miguel José Yacamán,

Diamond and Related Materials

Materials ScienceDiamond-like CarbonChemical EngineeringMultifunctional DevicesEngineeringBroad RangeNanomaterialsNanotechnologyApplied PhysicsNanostructure SynthesisThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingEnhanced Growth