Concepedia

Publication | Closed Access

Ni and Ti silicide oxidation for CMOS applications investigated by XRD, XPS and FPP

DOI

16

Citations

18

References

2017

Year

Md. Khalilur Rahman, F. Nemouchi, T. Chevolleau, Patrice Gergaud, K. Yckache
Materials Science in Semiconductor Processing

References

YearCitations

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