Marvelous MEMs

Abstract

Microelectromechanical systems (MEMS) are a foundation for a broad range of mechanical, chemical, optical, and biotech products (sensors, microstructures and actuators) fabricated as integrated circuits on (primarily) silicon wafers in a batch mode. Commercial MEMS products include pressure sensors, acceleration sensors, gyros, ink-jet nozzles, read-write head positioners in hard drives, and digital light processors (DLPs) in projectors and television sets. The first four decades of MEMS development created a US$8 billion market. During the next decade, the MEMS market is estimated to increase by US$32 billion. Based on the presented overview of emerging MEMS sensors and microstructures, such a magnitude of growth is definitely possible.