Ultrasensitive Flexible Temperature-Mechanical Dual-Parameter Sensor Based on Vanadium Dioxide Films

Abstract

Flexible temperature and mechanical sensing capabilities are of great importance in the artificial intelligence. Here, we report a skin conformable, high sensitive temperature-mechanical dual-parameter sensor based on a PET/vanadium dioxide (VO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> )/PDMS multilayer structure fabricated using the transfer printing technique. The ultrahigh mechanical sensitivity to strains in the range of 0%-0.1% with a gauge factor over 400 was attributed to the disconnection-reconnection process of the ziplike nanoscale cracks under strain or vibration. And the enhanced temperature sensing performance with a resolution of 0.1 K was attributed to the high temperature coefficient of resistance of VO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> material. The temperature and the mechanical signals simultaneously recorded in the electrical resistance signal were separated via fast Fourier transform (FFT) and inverse FFT. The flexibility and ultra-sensitivity to temperature and vibration make the sensor a promising application in advanced artificial intelligence.