Concepedia

Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: A joint experimental and modeling study

Jonathan Dervaux, Pierre‐Antoine Cormier, Pavel Moskovkin, Olivier Douhéret, Stéphanos Konstantinidis, Roberto Lazzaroni, Stéphane Lucas, Rony Snyders

Thin Solid Films · 2017 · 61 citations · 35 references

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References

35

A new algorithm for Monte Carlo simulation of Ising spin systems

Alfred B. Bortz, M. H. Kalos, Joel L. Lebowitz · Journal of Computational Physics · 1975 · 2.4K citations

, , +15

Microstructural evolution during film growth

I. Petrov, P.B. Barna, Lars Hultman et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 1.7K citations

, , +17

The microstructure of sputter‐deposited coatings

John A. Thornton · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 1.3K citations

, , +16

Revised structure zone model for thin film physical structure

R. Messier, Anupam Giri, R. Roy · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 945 citations

, , +12

Glancing angle deposition: Fabrication, properties, and applications of micro- and nanostructured thin films

Matthew M. Hawkeye, Michael J. Brett · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2007 · 892 citations

, , +9