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Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: A joint experimental and modeling study

Materials ScienceEngineeringThin-film FabricationSurface ScienceApplied PhysicsMagnetron SputteringJoint ExperimentalAngle DepositionMagnetic Thin FilmsThin FilmsChemical DepositionSurface ProcessingChemical Vapor DepositionThin Film Processing