Publication | Open Access

Structural, chemical and optical properties of cerium dioxide film prepared by atomic layer deposition on TiN and Si substrates

Materials ScienceIi-vi SemiconductorChemical EngineeringOptical MaterialsCerium Dioxide FilmEngineeringOptical PropertiesSurface ScienceApplied PhysicsChemical DepositionChemical Vapor DepositionAtomic Layer DepositionThin Film Processing