Materials Science in Semiconductor Processing · 2017 · 51 citations · 15 references
Natural SciencesMaterials EngineeringMaterials ScienceHeat TransferSemiconductor MaterialsThin FilmsMetal Oxide NanomaterialsOxide SemiconductorsSemiconductor Thin FilmsThermal Properties Of SemiconductorsThin Film Thermal PropertiesThin-film MaterialsOxide Film StabilityPulsed Laser DepositionSemiconductor Oxide Thin FilmsThermal StabilityThin Oxide FilmsThin Oxide LayersZinc Oxides
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