Design, Analysis, and Realization of a Novel Piezoelectrically Actuated Rotary Spatial Vibration System for Micro-/Nanomachining

Abstract

In the newly proposed rotary spatial vibration (RSV)-assisted diamond cutting system, a piezoelectrically actuated monolithic compliant spatial vibrator (CSV), generating three decoupled translational vibrations with high working bandwidth, is deliberately designed to work on the rotating spindle of a machine. Using a matrix-based compliance modeling method and the Lagrangian principle, the complete compliance and system dynamics models of the CSV are formulated. The analytical modeling results are further validated by comparison with results obtained through finite-element analysis. Offline experimental tests were conducted to investigate the actual strokes, parasitic motions, as well as the natural frequencies of the CSV along its three working directions. A preliminary performance assessment of the developed RSV-assisted diamond cutting system for the generation of complex multitier micro-/nanostructures was conducted to demonstrate the feasibility and efficiency of the RSV system for mechanical micro-/nanomachining.