20.1 A digitally controlled fully integrated voltage regulator with on-die solenoid inductor with planar magnetic core in 14nm tri-gate CMOS

Abstract

Fully integrated on-die buck voltage regulators (VR) promise efficient and wide-range local power delivery and management capability with fast transient response for fine-grain DVFS domains of high power density in complex SoCs. Integration of high-quality power inductors that can support high current density with minimal losses is a major challenge.