Journal of Physics Condensed Matter · 2017 · 23 citations · 23 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsHeat TransferSemiconductor DevicesHeat ConductionTemperature MeasurementTemperature SensorsThermal SensorsThermoelectric MaterialsThin Film Thermal PropertiesFinite Element SimulationMagnetic Tunnel JunctionsMagnetic Tunneling JunctionsMeasurement AccuracyThermal CharacterizationThermoelectric PropertiesTunnel JunctionsTunneling Magnetoresistance
. This allowed the measurement of thermoelectric properties as a function of the tunnel barrier thickness. The thermometers showed a homogeneous heating behavior for all devices across the wafer. Combining the in-stack temperature measurements and finite element simulations the thermal profile across the MTJ structure and the thermopower were estimated with a noticeable improvement of the measurement accuracy. The studied MTJ structures showed tunneling magnetoresistance (TMR) ratios up to 125%, and tunneling magnetothermopower (TMTP) up to 35%.
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