Optics Communications · 2017 · 72 citations · 24 references
EngineeringManufacturing EngineeringOptoelectronicsDisplacement MeasurementDisplacement SensorsInterferometryOptical MetrologyRange EstimationDisplacement SensingDisplacement Sensor ResolutionGrating-based MetrologyOptical Displacement MeasurementOptical Displacement Sensors
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