Integration of Single-Photon Emitters into 3C-SiC Microdisk Resonators

Abstract

We demonstrate the integration of bright, fully polarized single-photon emitters readily created by thermal oxidation of cubic silicon carbide (SiC) into microdisk resonators. The resonators are created by a direct laser beam writing lithography technique that is used to align the position of the resonator to a preselected single defect. Quality factors as high as 1900 are measured. We show the presence of whispering gallery modes in the emission spectrum of a single defect and an increase in the detected emission intensity. The experimental work is supported by numerical calculations of the electric field distribution in the resonators.