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Photocatalysis assisting the mechanical polishing of a single-crystal SiC wafer utilizing an anatase TiO 2 -coated diamond abrasive

Materials EngineeringMaterials ScienceChemical EngineeringSingle-crystal Sic WaferEngineeringDiamond-like CarbonInorganic PhotochemistryPhotocatalysisMechanical PolishingPhoto-electrochemical CellAnatase Tio 2