Publication | Open Access
Deep plasma etching of Parylene C patterns for biomedical applications
12
Citations
8
References
2017
Year
EngineeringElectron-beam LithographyBeam LithographyMicrofabricationMicroscopyMaterials FabricationSurface ScienceApplied PhysicsDeep Plasma EtchingBiomedical EngineeringPlasma EtchingPlasma Processing3D PrintingNanolithography Method
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