An over 1Mfps global shutter CMOS image sensor with 480 frame storage using vertical analog memory integration

Abstract

This paper presents an over 1Mfps global shutter CMOS image sensor with on-chip 480 memories per pixel using high capacitance density vertical analog memory integration technology. The prototype chips with 96 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">H</sup> ×128 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">V</sup> pixels were fabricated with various memory fabrication conditions and ultra-high speed video capturing at 1Mfps with 480 consecutive frames is successfully demonstrated.