Piezoresistive Silicon Cantilever Covered by ZnO Nanorods for Humidity Sensing

Abstract

Gravimetric humidity sensing performance is described with piezoresistive silicon cantilevers covered by ZnO nanorods in a low-cost wet chemical deposition process. High sensitivity at small hysteresis between increasing and decreasing humidity loading is observed as well as a good temporal stability at constant humidity and temperature. Due to ease of interfacing with electronics and low-power operation promoted by resonant devices, we expect that the developed sensors will be highly attractive for wearable environmental monitoring applications.