Nano Energy · 2016 · 58 citations · 29 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsEnergy MaterialsThin FilmsAtomic Layer DepositionDielectric MaterialsDielectricsElectromechanical Energy ConversionMems Energy HarvestingThin Film Electrical PropertiesAtomic Layer Deposition PassivationEnergy HarvestingEnergy Harvesting MaterialsEnergy Harvesting SystemsThin-film Dielectrics
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