Concepedia

Spectroscopic and Langmuir probe measurements of Ar-N2 mixture plasma in magnetic pole enhanced ICP source

Maria Younus, N. U. Rehman

Optik · 2016 · 10 citations · 28 references

DOI

Concepts

References

28

Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz

Valery Godyak, R. B. Piejak · Physical Review Letters · 1990 · 552 citations

, , +14

Application of excitation cross sections to optical plasma diagnostics

John B. Boffard, Chun C. Lin, Charles A DeJosephJr · Journal of Physics D Applied Physics · 2004 · 210 citations

, , +14

Nitrogen dissociation in a low pressure cylindrical ICP discharge studied by actinometry and mass spectrometry

T. Czerwiec, Frank Greer, David B. Graves · Journal of Physics D Applied Physics · 2005 · 137 citations

, , +12

Spectroscopic measurements of the electron temperature in low pressure radiofrequency Ar/H<sub>2</sub>/C<sub>2</sub>H<sub>2</sub>and Ar/H<sub>2</sub>/CH<sub>4</sub>plasmas used for the synthesis of nanocarbon structures

Francisco J. Gordillo‐Vázquez, M. Camero, C. Gómez‐Aleixandre · Plasma Sources Science and Technology · 2005 · 129 citations

, , +15

Measurement of metastable and resonance level densities in rare-gas plasmas by optical emission spectroscopy

John B. Boffard, Robert Jung, Chun C. Lin et al. · Plasma Sources Science and Technology · 2009 · 124 citations

, , +14