A capacitorless DRAM cell on SOI substrate

Abstract

We propose a capacitorless DRAM (CDRAM) cell on SOI substrate with large READ current (>100 /spl mu/Aspl mu/m), small cell size, and simple fabrication process. PISCES simulations are used to analyze the memory cell operations. The CDRAM cell size is that of a transistor, which makes it very attractive for high density memory applications. Since the fabrication process of CDRAM is compatible with that of the general purpose SOI CMOS and complementary BiCMOS process, CDRAM can also be used for integrated on-chip memory and is an interesting candidate as the technology driver of SOI VLSI.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>