Publication | Closed Access
Design and fabrication of a low insertion loss capacitive RF MEMS switch with novel micro-structures for actuation
51
Citations
14
References
2016
Year
Electrical EngineeringEngineeringMicrofabricationNano Electro Mechanical SystemMicroactuatorMicroelectronicsRf SubsystemMicro-electromechanical SystemNovel Micro-structures
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