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Structure and density profile of diamond-like carbon films containing copper: Study by X-ray reflectivity, transmission electron microscopy, and spectroscopic ellipsometry

Materials ScienceDiamond-like Carbon FilmsDiamond-like CarbonMaterial AnalysisEngineeringCarbon-based MaterialTransmission Electron MicroscopyNanomaterialsX-ray ReflectivityApplied PhysicsNanometrologyCarbon-based Films