Reliability evaluation of tungsten donut-via as an element of the highly robust metallization - Concepedia

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Reliability evaluation of tungsten donut-via as an element of the highly robust metallization

11

Citations

3

References

2016

Year

Verena Hein, Marco Erstling, Raj Sekar Sethu, Kirsten Weide-Zaage, Tianlin Bai

Microelectronics Reliability

Materials EngineeringMaterials ScienceEngineeringCorrosionReliability EvaluationMetallurgical InteractionMetallurgical ProcessRobust MetallizationMetallurgical SystemHigh-performance MetalMicrostructureMetal Processing

References

	Year	Citations

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