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CMOS–MEMS resonators: From devices to applications

Electrical EngineeringEngineeringMicrofabricationRadio Frequency Micro-electromechanical SystemsApplied PhysicsNano Electro Mechanical SystemMicroelectromechanical SystemsCmos TechnologyIntegrated CircuitsCmos–mems ResonatorsMicroelectronicsMicro-electromechanical System