Microlens fabrication by 3D electron beam lithography combined with thermal reflow technique - Concepedia

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Microlens fabrication by 3D electron beam lithography combined with thermal reflow technique

37

Citations

20

References

2016

Year

V. Grigaliūnas, Algirdas Lazauskas, Dalius Jucius, Darius Viržonis, Brigita Abakevičienė, S. Smetona, Sigitas Tamulevičius

Microelectronic Engineering

Materials ScienceEngineeringElectron-beam LithographyBeam LithographyMicrofabricationThermal Reflow TechniqueFabrication TechniqueApplied PhysicsMicrolens FabricationElectronic PackagingNanolithography MethodMicroelectronicsMicro-optical Component3D PrintingElectron Beam Lithography

References

	Year	Citations

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