Publication | Open Access

Patterning of diamond like carbon films for sensor applications using silicon containing thermoplastic resist (SiPol) as a hard mask

Materials ScienceCarbon FilmsDiamond-like CarbonEngineeringGlassy CarbonCarbon-based MaterialMicrofabricationNanoelectronicsThermoplastic ResistApplied PhysicsSensor DesignHard MaskCarbon-based FilmsNanolithography Method