Publication | Closed Access
Superhydrophobic Si surfaces having microscale rod structures prepared in a plasma etching system
43
Citations
22
References
2016
Year
Materials ScienceSelf-cleaning SurfaceMicroscale Rod StructuresEngineeringPhysicsMicrofabricationNanotechnologySurface ScienceApplied PhysicsSuper-hydrophobic SurfaceSuperhydrophobic Si SurfacesMicroelectronicsPlasma Etching
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