Concepedia

Publication | Closed Access

Plasma-enhanced chemical vapor deposition of SiO /SiN Bragg reflectors

DOI

23

Citations

18

References

2002

Year

V. Gottschalch, R. Schmidt, B. Rheinländer, Dušan Pudiš, Sebastian Hardt, J. Kvietková, Gregory J. Wagner, R. Franzheld
Thin Solid Films

References

YearCitations

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