Mechanical Testing of Isolated Amorphous Silicon Slanted Nanorods

Abstract

Mechanical testing was performed on a new class of nanostructures-amorphous Si slanted nanorods of rectangular cross section, fixed at one end to the substrate. These nanorods were grown spatially well separated on nano-pillars under the oblique angle physical vapor deposition technique. Various samples with different dimensions and inclination angles were tested in bending using an atomic force microscope. The material response was elastic up to large stresses/deflections. The Young's modulus was calculated from the slope of the experimentally observed stiffness versus the geometrical factor common to all the samples and was found to be (94.14 +/- 10.21) GPa. No size effect of this parameter was observed within the accuracy of the present measurement.