Preparation and Properties of ferroelectric Bi<sub>2</sub>SrTa<sub>2</sub>O<sub>9</sub> thin films for FeRAM using Flash-MOCVD

T. Ami, Katsuyuki Hironaka, C. Isobel, N. Nagel, Masataka Sugiyama, Yuji Ikeda, Kôji Watanabe, Akio Machida, K. Miura, Masahiro Tanaka

MRS Proceedings · 1995 · 43 citations · 6 references

Concepts

References

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