IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2014 · 10 citations · 4 references
EngineeringElectrical EngineeringManufacturing EngineeringMicroelectromechanical SystemsMicrofabricationMicrowave EngineeringMems FabricationMicrowave Integrated CircuitsMicrowave Passive ComponentsMillimeter-wave CommunicationsRadio-frequency Integrated CircuitsRf MemsManufacturing ThroughputMicrowave Integrated Circuit DesignMillimeter-wave Integrated CircuitsMonolithic Microwave Integrated CircuitsPackaging For High-frequency Devices
The possibility of using 6-GHz frequencies for passive SAW tags is discussed. An example of an inline 6-GHz SAW tag design is presented. Supposing that an ultrawide frequency bandwidth B = 775 MHz can be used, the tag dimensions can be significantly reduced and the loss of reflected response remains at an acceptable level of around 50 dB. The devices were manufactured using E-beam lithography and, probed on wafer, show performance close to predicted, including the loss level of approximately 55 dB. The possibility of high-throughput manufacturing by combining nano-imprint and e-beam lithography is discussed.
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Anti-collision methods for global SAW RFID tag systems
C.S. Hartmann, Paul Hartmann, Philip M. Brown et al. · 2005 · 66 citations