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Performance of thin film Transistors on Unhydrogenated <i>In-Situ</i> Doped Polysilicon films Obtained by Solid Phase Crystallization

Materials ScienceElectrical EngineeringEngineeringElectronic MaterialsApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationThin Film Process TechnologyThin FilmsSolid Phase CrystallizationThin Film TransistorsThin Film Processing