Electrical Characteristic Study of an SOI-LIGBT With Segmented Trenches in the Anode Region

Abstract

This paper presents the electrical characteristic of a 500 V silicon-on-insulator (SOI) lateral insulated-gate bipolar transistor (LIGBT) with segmented trenches in the anode (STA) region. The STA-LIGBT features segmented n <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> anodes and segmented trenches. The segmented n <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> anodes are shorted to the p <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> anode, which accelerates the extraction of stored electrons during the device turn-OFF. The segmented trenches are arranged between the p <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> anode and the shorted n <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> anode. The resistors between the adjacent segmented trenches and the adjacent segmented n <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> anodes contribute to low snapback voltage (V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">S</sub> ) while maintain high current density. In addition, an internal diode is formed by introducing the shorted n <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> anode. The 3-D simulations and the experiments are carried out to characterize the electrical performances of the STA-LIGBT and its internal diode. Compared with the conventional SOI-LIGBT, the STA device achieves a 73% improvement in turn-OFF time (t <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">OFF</sub> ) at the same current density. Correspondingly, the internal diode of the STA-LIGBT achieves a forward voltage drop (V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">F</sub> ) of 1.32 V and a reverse recovery time (t <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">rr</sub> ) of 321 ns, which are superior to those of a conventional p-i-n SOI diode.