New Stress Activation Method for Kerfless Silicon Wafering Using Ag/Al and Epoxy Stress-Inducing Layers

Abstract

The SLIM-cut technique provides a way to obtain thin silicon foils without a standard sawing step, thus avoiding kerf losses. This process consists of three steps: depositing a stress-inducing layer on top of the silicon surface; stress activation by heating and cooling, resulting in crack propagation in the silicon and detachment of a thin silicon layer; and a chemical cleaning to remove the stress-inducing layer. This paper describes a new stress activation method using Ag/Al and epoxy stress-inducing layers. The crack propagation is controlled along the sample length in order to avoid unwanted additional crack formation and interaction with other crack fronts. Silicon foils with thickness ranging between 50 and 130 μm were obtained with effective lifetimes between 1 and 81 μs.