Publication | Closed Access
Growth and Thermal Stability of SiGe/Si Superlattices on Bulk Si Wafers
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2008
Year
Materials EngineeringMaterials ScienceWafer Scale ProcessingEngineeringAdvanced Packaging (Semiconductors)PhysicsPeriods Sige/si SuperlatticesBulk Si WafersApplied PhysicsSiliceneSolid MechanicsSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMicroelectronicsThermal StabilitySige/si SuperlatticesMicrostructure
Deals with (i) the growth and thermal stability of large number or periods SiGe/Si superlattices on bulk Si and (ii) the impact of B and P doping and of C alloying of SiGe on the growth kinetics of SiGe/Si superlattices.