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Low-Temperature Poly-Si TFT by Excimer Laser Annealing

MRS Proceedings · 2001 · 12 citations · 1 references

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EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsSemiconductor DevicesSilicon MaterialsThermal Properties Of SemiconductorsThin Film AnnealingAnnealing Temperature EffectsAnnealing Time EffectsLaser AnnealingLow-temperature FabricationSilicon Annealing

References

1

Low Temperature Poly‐Si TFT Technology

N. Ibaraki · SID Symposium Digest of Technical Papers · 1999 · 56 citations

Engineering, Electrical Engineering, Electronic Materials +14