SID Symposium Digest of Technical Papers · 1999 · 56 citations · 0 references
EngineeringElectrical EngineeringElectronic MaterialsMicroelectronicsSemiconductor DevicesCmos Circuit DesignDisplay DesignDisplay TechnologiesIntegrated Circuit DesignThin-film TransistorsDisplay SubstratesHigh-density DisplaysLarge-area ElectronicsLow-temperature FabricationPixel DensityThreshold VoltageThreshold Voltage Control
Abstract This paper focuses on Excimer laser crystallized poly‐Si TFT technologies for obtaining high performance note‐book‐size displays with high pixel density. Topics included are TFT structures for C‐MOS circuits and their process integration, threshold voltage control, and reliability of TFT characteristics. These technologies have been applied to 8.4‐inch SVGA, 10.4‐inch XGA and 12.1‐inch XGA displays.