Concepedia

Design of double-layer anti-sputtering targets for plume effects experimental system

Shengfei Shang, Guobiao Cai, Dingqiang Zhu, Bijiao He

Science China Technological Sciences · 2016 · 11 citations · 18 references

DOI

Concepts

References

18

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 792 citations

, , +13

ENERGY DEPENDENCE OF ION-INDUCED SPUTTERING YIELDS FROM MONATOMIC SOLIDS AT NORMAL INCIDENCE

Yasunori Yamamura, H. Tawara · Atomic Data and Nuclear Data Tables · 1996 · 745 citations

, , +4

Theory of sputtering and comparison to experimental data

Y. Yamamura · Nuclear Instruments and Methods in Physics Research · 1982 · 118 citations

, , +3

Angular dependence of sputtering yields of monatomic solids

Yasumichi Yamamura, Yukikazu Itikawa, Noriaki Itoh · Institutional Repositories DataBase (IRDB) · 1983 · 111 citations · Full text

, , +8

Microstructure, corrosion and tribological behaviors of TiAlSiN coatings deposited by cathodic arc plasma deposition

Chi-Lung Chang, Jyh‐Wei Lee, Ming-Don Tseng · Thin Solid Films · 2009 · 93 citations

, , +16