Materials Science in Semiconductor Processing · 2016 · 15 citations · 12 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesThin FilmsAmorphous Electronic MaterialsAmorphous SemiconductorsSemiconductor Device MaterialsSemiconductor Thin FilmsThin-film MaterialsThin-film TransistorsAmorphous Oxide SemiconductorsAmorphous Semiconductor FilmsMetal Gate ElectrodesOxide Thin-film TransistorsSemiconductor Oxide Thin FilmsThin-film ElectrodesThin-film Semiconductors
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