Vacuum microelectronics

Abstract

An overview of the progress, problems, and potential of vacuum microelectronics is presented. Particular attention is given to fabrication processes. It is emphasized that vacuum microelectronics represents a promising field with many potential applications niches (i.e. with intrinsic advantages over other technologies), rather than a single great revolution comparable to that of silicon. Important research problems that remain and potential applications are discussed.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>