High-performance photonic BiCMOS process for the fabrication of high-bandwidth electronic-photonic integrated circuits

D. Knoll, Stefan Lischke, R. Barth, Lars Zimmermann, B. Heinemann, H. Rücker, M. Kroh, Anna Pęczek, A. Awny, Çağri Ulusoy,

2015 · 44 citations · 10 references

Concepts

Abstract

An advanced photonic BiCMOS process is demonstrated capable, on the receiver side, for 100 Gb/s optical line rate. Key components of this process are monolithically integrated wave-guide Ge photodiodes showing more than 70 GHz bandwidth and 1 A/W responsivity, and SiGe HBTs with fT/fmax values of 240/290 GHz.

References

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