Influence of design and fabrication on RF performance of capacitive RF MEMS switches

Electromechanical considerations in developing low-voltage RF MEMS switches

Dimitrios Peroulis, Sergio Pacheco, Kamal Sarabandi et al. · IEEE Transactions on Microwave Theory and Techniques · 2003 · 282 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

RF MEMS Switches With Enhanced Power-Handling Capabilities

Dimitrios Peroulis, Sergio Pacheco, L.P.B. Katehi · IEEE Transactions on Microwave Theory and Techniques · 2004 · 124 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16

Surface roughness, asperity contact and gold RF MEMS switch behavior

O. Rezvanian, M.A. Zikry, Christopher Brown et al. · Journal of Micromechanics and Microengineering · 2007 · 101 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Reliability of MEMS: A perspective on failure mechanisms, improvement solutions and best practices at development level

Jacopo Iannacci · Displays · 2014 · 91 citations

Engineering, Mechanical Engineering, Systems Engineering +17

A low actuation voltage electrostatic actuator for RF MEMS switch applications

Chia-Hua Chu, Wen‐Pin Shih, Sheng-Yuan Chung et al. · Journal of Micromechanics and Microengineering · 2007 · 80 citations

Engineering, Electrical Engineering, Actuators +16