A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer

Performance of low-loss RF MEMS capacitive switches

Charles L. Goldsmith, Zhimin Yao, S. Eshelman et al. · IEEE Microwave and Guided Wave Letters · 1998 · 428 citations

Engineering, Electrical Engineering, Materials Science +17

A methodology for determining mechanical properties of freestanding thin films and MEMS materials

Horacio D. Espinosa, Barton C. Prorok, M. Fischer · Journal of the Mechanics and Physics of Solids · 2002 · 331 citations

Natural Sciences, Materials Engineering, Materials Science +16

LOW-TEMPERATURE MIGRATION OF SILICON IN THIN LAYERS OF GOLD AND PLATINUM

Akio Hiraki, M.−A. Nicolet, J. W. Mayer · Applied Physics Letters · 1971 · 194 citations · Full text

Natural Sciences, Chemistry, Materials Science +9

Switchable Low-Loss RF MEMS<tex>$Ka$</tex>-Band Frequency-Selective Surface

Bernhard Schoenlinner, A. Abbaspour-Tamijani, Leo C. Kempel et al. · IEEE Transactions on Microwave Theory and Techniques · 2004 · 155 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +14

A High-Reliability High-Linearity High-Power RF MEMS Metal-Contact Switch for DC–40-GHz Applications

Chirag D. Patel, Gabriel M. Rebeiz · IEEE Transactions on Microwave Theory and Techniques · 2012 · 119 citations

Engineering, Electrical Engineering, Materials Science +17