Multi-wavelength phase-shifting interferometry for micro-structures measurement based on color image processing in white light interference

Two-wavelength phase shifting interferometry

Yeou-Yen Cheng, James C. Wyant · Applied Optics · 1984 · 432 citations

Engineering, Physics, Metrology +16

Multiple-wavelength phase-shifting interferometry

Yeou-Yen Cheng, James C. Wyant · Applied Optics · 1985 · 309 citations

Natural Sciences, Physics, Biomedical Optics +15

Step height measurement using two-wavelength phase-shifting interferometry

Katherine Creath · Applied Optics · 1987 · 260 citations

Engineering, Physics, Metrology +16

Phase shifting for nonsinusoidal waveforms with phase-shift errors

Kenichi Hibino, Kieran G. Larkin, B. F. Oreb et al. · Journal of the Optical Society of America A · 1995 · 228 citations

Engineering, Electrical Engineering, Analog Electronics +8

Two-Wavelength Interferometry

C. Polhemus · Applied Optics · 1973 · 223 citations

Engineering, Geophysics, Instrumentation +9