Publication | Closed Access
Fabrication of ordered Si nanopillar arrays for ultralow reflectivity
14
Citations
29
References
2016
Year
Materials ScienceWafer Scale ProcessingEngineeringUltralow ReflectivityNanomaterialsNanotechnologyMicrofabricationApplied PhysicsSilicon WaferAspect RatioSemiconductor Device FabricationNanometrologyNanofabricationSilicon On InsulatorNanolithography MethodNanostructuresSilicon Nanopillar Arrays
Ordered silicon nanopillar arrays with the aspect ratio of 29 : 1 suppressed the reflectivity of silicon wafer lower than 0.1%.
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