Publication | Closed Access
Study on the machined depth when nanoscratching on 6H-SiC using Berkovich indenter: Modelling and experimental study
73
Citations
20
References
2016
Year
Materials EngineeringMaterials ScienceEngineeringMechanical EngineeringExperimental StudyCarbideBerkovich IndenterMaterial PerformanceStructural CeramicSemiconductor Device FabricationPlasma EtchingMicrostructure
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