Properties of Mg Doped ZnO Films Prepared by Ultrasonic Spray Pyrolysis

Abstract

This work is focused on the preparation of Mg doped ZnO films by ultrasonic spray pyrolysis and investigated the physical, optical and electrical properties of the films. These films were prepared from 0.02 M of Zn (CH 3 OO) 2 .2H 2 O and MgCl 2 was used for doping. The atomic percentage ratio of Mg/Zn was varied from 0 to 9 at.%. The crystalline phase of all films was identified as ZnO polycrystalline structure with preferred orientation along the (002) plane. While, the grain shape of ZnO film was irregular shape, this shape changed to spherical shape with doped Mg concentration and changed again to rod shape with doped Mg concentration to 9 at.%. Although, the Mg dopant affects the shape of ZnO films but don’t affect resistivity of the films. Moreover, the Mg dopant shifts the absorption edge in transmittance spectra of films to lower wavelength and increases band gap of the films.