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Xe+ FIB Milling and Measurement of Amorphous Silicon Damage
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2013
Year
Xe+ Fib MillingEngineeringMicroscopyMechanical EngineeringSilicon On InsulatorAugust 4Microscopy MethodMaterials ScienceMaterials EngineeringPhysicsMicroanalysis– August 8Semiconductor Device FabricationMicroelectronicsMicroanalysis 2013MicrostructureMicrofabricationApplied PhysicsAmorphous SolidMechanics Of Materials
Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.